Key-title  

Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)

Identifiers
Resource information
Archival Status
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Title proper: Journal of vacuum science & technology. Microelectronics processing and phenomena.

Other variant title: Journal of vacuum science and technology.

Other variant title: Microelectronics processing and phenomena

Country: United States

Medium: Online


logo Keepers
Status Publisher Keeper From To Updated Extent of archive
Preserved

AIP Publishing

Portico

1983

1990

28/04/2024

Preserved : 1983: 1(1-4), 1984: 2(1-4), 1985: 3(1-6), 1986: 4(1-6), 1987: 5(1-6), 1988: 6(1-6), 1989: 7(1-6), 1990: 8(1-6)
Archival Status
Status Publisher Keeper From To Updated Extent of archive
Preserved

AIP Publishing

Portico

1983

1990

28/04/2024

Preserved : 1983: 1(1-4), 1984: 2(1-4), 1985: 3(1-6), 1986: 4(1-6), 1987: 5(1-6), 1988: 6(1-6), 1989: 7(1-6), 1990: 8(1-6)
Record information

Last modification date: 06/02/2021

Type of record: Confirmed

ISSN Center responsible of the record: ISSN National Centre for the USA

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