Key-title Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
Title proper: Journal of vacuum science & technology. Microelectronics processing and phenomena.
Other variant title: Journal of vacuum science and technology.
Other variant title: Microelectronics processing and phenomena
Country: United States
Medium: Online
Record information
Last modification date: 06/02/2021
Type of record: Confirmed
ISSN Center responsible of the record: ISSN National Centre for the USA